摘要 |
The present invention provides an amorphous dielectric film and an electronic component capable of maintaining a relative dielectric constant and temperature characteristics and increasing withstanding voltage even when the dielectric film becomes thinner. The dielectric film is made of an amorphous composition, wherein a main component of the dielectric film is represented as A-B-O. A includes at least two elements selected from Ba, Ca and Sr. B includes the element of Zr, wherein, when the main component of the dielectric film is represented as (Ba_xCa_ySr_z)_α-B-O, 0<=x<= 1, 0<=y<=1 and 0<=z<=1, respectively, x + y + z = 1, at least any two elements among x, y and z are 0.1 or more and 0.5<=α<=1.5 when A/B is represented as α. |