| 摘要 |
The present invention relates to an embedded fume exhausting apparatus, including: a body part (10) including a first connector formed on an upper part, a second connector (12) formed on a side or a floor, and an intake fan (13) which forms an intake pressure to the first connector (11), and forms an exhaust pressure to the second connector (12), while being embedded in a passage among semiconductor facility lines; and intake kits (20, 120) wherein a number of intake holes to intake fume generated during a maintenance process of the semiconductor facility line are formed, while being arranged around the corresponding semiconductor facility line for maintenance; and an intake hose (30) to connect the first connector (11) and the intake kits (20, 120). The embedded fume exhausting apparatus can exhaust the fume generated during the maintenance process of the facility line effectively, without hindering a worker moving along the passage. |
