发明名称 チタン酸化物系蒸着材料
摘要 PROBLEM TO BE SOLVED: To provide a vapor deposition material based on titanium oxide having performance equivalent to a vapor deposition material of titanium suboxide and sufficient mechanical strength that may inhibit an occurrence of splash and that may give a vapor deposition film of titanium dioxide having high refractive index stably regardless of an object for vapor deposition.SOLUTION: A vapor deposition material comprises a sintered body consisting of: a major component consisting of a titanium oxide represented by a composition formula TiO(1.4≤x≤1.8); a first accessory component consisting of at least one selected from a group consisting of aluminum oxide, zirconium oxide, hafnium oxide and ytterbium oxide; a second accessory component consisting of at least one selected from a group consisting of a compound having a garnet structure and yttrium oxide; and a third accessory component consisting of at least one titanate salt.
申请公布号 JP5929673(B2) 申请公布日期 2016.06.08
申请号 JP20120215412 申请日期 2012.09.28
申请人 日亜化学工業株式会社 发明人 山田 正一;田中 祐文
分类号 C23C14/24;C04B35/46;G02B5/22 主分类号 C23C14/24
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