MULTI- DIRECTION SEEBECK MEASUREMENT SENSORS FOR THERMOELECTRIC THIN FILM

摘要

According to the present invention, a Seebeck measurement sensor for a thermoelectric thin film comprises: a heater unit arranged on a bottom surface; a first detection sensor arranged on an upper side of the heater unit, having a first pattern on an upper surface; and a second detection sensor separated from the first detection sensor by a constant distance, and formed on a lower surface of a second pattern. A sample of an object between the first and the second pattern is able to be arranged to be in surface contact with the first and the second pattern. As such, in-plane and cross-plane direction Seebeck coefficients is able to be measured.