| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tool cutting device capable of cleaning a surface of a workpiece to which cutting processing is applied, and cleaning a surface opposite to the face to which cutting processing is applied. <P>SOLUTION: A tool cutting device 2 comprises transportation means for transporting a workpiece to a holding table of a second face cleaning mechanism from a chuck table 42 while a first face of the workpiece cut by tool cutting means is exposed. The first face cleaning means has a cleaning plate with a diameter almost identical to that of the workpiece opposed to the workpiece held by the transportation means. Plural cleaning liquid jet ports opposed to the workpiece held by the transportation means and jetting the cleaning liquid toward the first face of the workpiece are formed on an upper face of the cleaning plate, and an annular outer peripheral wall surrounding the plural cleaning liquid jet ports is formed on an upper face outer peripheral edge of the cleaning plate. A cleaning liquid storage section is formed, and the first face of the workpiece is in contact with the cleaning liquid stored in the cleaning liquid storage section, so as to clean the first face of the workpiece. <P>COPYRIGHT: (C)2013,JPO&INPIT |
