TWO-DIRECTION SHAPE-MEMORY ALLOY THIN FILM ACTUATOR AND METHOD FOR MANUFACTURING SHAPE-MEMORY ALLOY THIN FILM USED IN THE ACTUATOR

摘要

A bidirectional shape memory alloy thin film actuator includes a crystalline shape memory alloy thin film, and is formed substantially in a single layer while having a residual stress during deposition, and operates at a temperature equal to or higher than room temperature, and is not required to be applied with a particular bias force.