发明名称 |
ORIENTED SUBSTRATE FOR USE IN FORMATION OF EPITAXIAL FILM, AND METHOD FOR PRODUCING SAME |
摘要 |
The present invention provides a textured substrate for forming an epitaxial film, including a textured metal layer on at least one surface of the layer, the textured metal layer including a copper layer having a cube texture, the textured metal layer having, on a surface of the layer, palladium added in an amount of 10 to 300 ng/mm 2 per unit area, the hydrogen content of the surface of the textured mental layer being 700 to 2000 ppm. This textured substrate is produced through a step of adding 10 to 300 ng/mm 2 per unit area of palladium by strike plating to a surface of the copper layer having a cube texture. |
申请公布号 |
EP3029181(A1) |
申请公布日期 |
2016.06.08 |
申请号 |
EP20140832663 |
申请日期 |
2014.07.22 |
申请人 |
TANAKA KIKINZOKU KOGYO K.K. |
发明人 |
KASHIMA, NAOJI;WATANABE, TOMONORI;NAGAYA, SHIGEO;SHIMA, KUNIHIRO;KUBOTA, SHUICHI;SUGANUMA, RYOSUKE |
分类号 |
C30B29/22;C30B23/02;C30B25/18;H01B12/06;H01B13/00;H01L39/24 |
主分类号 |
C30B29/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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