发明名称 ORIENTED SUBSTRATE FOR USE IN FORMATION OF EPITAXIAL FILM, AND METHOD FOR PRODUCING SAME
摘要 The present invention provides a textured substrate for forming an epitaxial film, including a textured metal layer on at least one surface of the layer, the textured metal layer including a copper layer having a cube texture, the textured metal layer having, on a surface of the layer, palladium added in an amount of 10 to 300 ng/mm 2 per unit area, the hydrogen content of the surface of the textured mental layer being 700 to 2000 ppm. This textured substrate is produced through a step of adding 10 to 300 ng/mm 2 per unit area of palladium by strike plating to a surface of the copper layer having a cube texture.
申请公布号 EP3029181(A1) 申请公布日期 2016.06.08
申请号 EP20140832663 申请日期 2014.07.22
申请人 TANAKA KIKINZOKU KOGYO K.K. 发明人 KASHIMA, NAOJI;WATANABE, TOMONORI;NAGAYA, SHIGEO;SHIMA, KUNIHIRO;KUBOTA, SHUICHI;SUGANUMA, RYOSUKE
分类号 C30B29/22;C30B23/02;C30B25/18;H01B12/06;H01B13/00;H01L39/24 主分类号 C30B29/22
代理机构 代理人
主权项
地址