发明名称 テスタ及びそのテスタを含んだテスト装置
摘要 A tester may include a test head with a movable coupler, a probe card with a connector unit that is coupled with the coupler, and a needle block disposed on the probe card. In one example, the tester may test respective subsets of semiconductor devices on a wafer via a one-touch operation by moving a coupler on the test head, while the wafer remains in continuous and uninterrupted electrical contact with the tester during testing.
申请公布号 JP5933239(B2) 申请公布日期 2016.06.08
申请号 JP20110265518 申请日期 2011.12.05
申请人 三星電子株式会社Samsung Electronics Co.,Ltd. 发明人 金 洋起
分类号 H01L21/66;G01R31/28 主分类号 H01L21/66
代理机构 代理人
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