发明名称 CMOS半導体素子及びその製造方法
摘要 Example embodiments provide a complementary metal-oxide semiconductor (CMOS) semiconductor device and a method of fabricating the CMOS semiconductor device. The CMOS semiconductor device may include gates in the nMOS and pMOS areas, polycrystalline silicon (poly-Si) capping layers, metal nitride layers underneath the poly-Si capping layers, and a gate insulating layer underneath the gate. The metal nitride layers of the nMOS and pMOS areas may be formed of the same type of material and may have different work functions. Since a metal gate is formed of identical types of metal nitride layers, a process may be simplified, yield may be increased, and a higher-performance CMOS semiconductor device may be obtained.
申请公布号 JP5931312(B2) 申请公布日期 2016.06.08
申请号 JP20080041889 申请日期 2008.02.22
申请人 三星電子株式会社Samsung Electronics Co.,Ltd. 发明人 丁 英洙;丁 炯▲スク▼;許 成;白 賢錫
分类号 H01L21/8238;H01L21/28;H01L21/336;H01L27/092;H01L29/423;H01L29/49;H01L29/78 主分类号 H01L21/8238
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