发明名称 TARGET FOR X-RAY GENERATION AND X-RAY GENERATION DEVICE
摘要 A target for X-ray generation includes a substrate, a first X-ray target portion formed on an upper surface of the substrate, and a second X-ray target portion formed at a position surrounding the first X-ray target portion in the upper surface of the substrate, while being spaced from an outer edge of the first X-ray target portion.
申请公布号 EP3029708(A1) 申请公布日期 2016.06.08
申请号 EP20140832145 申请日期 2014.07.08
申请人 TOKYO ELECTRON LIMITED 发明人 YAMANISHI, YOSHIKI;KADOSAWA, KATSUJI
分类号 H01J35/08;H01J35/14 主分类号 H01J35/08
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