发明名称 |
A PELLICLE FRAME AND A PELLICLE |
摘要 |
A pellicle frame and a pellicle made with it is proposed in which at least one pair of the side bars of the frame are made to have a deflection (bow) which has an amount or a distance of displacement measured at the middle point of the side bar accounting for 0.01 through 1 % of the length of the respective side bar. |
申请公布号 |
EP3029522(A1) |
申请公布日期 |
2016.06.08 |
申请号 |
EP20150194993 |
申请日期 |
2015.11.17 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
KAZUTOSHI, SEKIHARA |
分类号 |
G03F1/64 |
主分类号 |
G03F1/64 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|