| 摘要 |
According to an embodiment of the present invention, a system to measure a Seebeck coefficient of a thermoelectric thin film comprises: a chamber configured in an internal space unit to maintain a degree of vacuum; a turbo pump installed in the chamber to discharge air out of the internal space unit to control the degree of vacuum in an internal space of the chamber; a jig module installed in the internal space unit, and supporting the side walls of a plurality of structures to fixate the positions of the structures; a heater unit position-fixated by the jig module and arranged on a floor of the internal space unit; a cooling unit arranged on an upper side of the heater unit, discharging the heat from the heater unit to the outside; at least a pair of insulation units positioned between the heater unit and the cooling unit; and a pair of sensing units positioned between the pair of the insulation units wherein a sample, being an object under measurement, may be positioned between the pair of the sensing units. The present invention enables thermoelectric characteristics of the thermoelectric thin film in a cross-plane direction, which has not been attempted in a conventional art, to directly be measured. |
