ACTUATOR DEVICE AND MIRROR DRIVE DEVICE

摘要

A torsion bar portion 10 is of a meandering shape including a plurality of straight sections 10a and a plurality of turnover sections 10b. The plurality of straight sections 10a extends in a first direction along a swing axis L and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections 10b alternately couples two ends of the straight sections 10a. Wiring is disposed on the torsion bar portion 10. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections 10b and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections 10a and are made of a second metal material more resistant to plastic deformation than the first metal material.