| 摘要 |
PROBLEM TO BE SOLVED: To provide a deposition jig improving workability of carbon removal by holding a substrate of a separator for a fuel cell in such a manner that the substrate takes a predetermined attitude, when depositing a conductive film on the substrate.SOLUTION: A deposition jig 100 for holding a substrate of a separator for a fuel cell when depositing a conductive film on the substrate comprises: a bus bar 130 fixed in a deposition chamber 200; a cover 140 for protecting the bus bar; and a frame member 110 including a pair of leg parts 111 of which the lower end portions are fixed to the bus bar, and a beam part 112 connecting upper end portions of the pair of leg parts with each other, respectively. The cover is disposed between the pair of leg parts, and each of the pair of leg parts includes an upper-side leg portion fixed to the beam part and a lower-side leg portion fixed to the bus bar. The lower-side leg portion and the upper-side leg portion are connected in a removal manner and by separating the lower-side leg portion and the upper-side leg portion, the cover can be taken out. |
