| 摘要 |
Sub-stages (50, 70) are disposed on the +Y and -Y sides of a main stage (40) that supports a mask (M). The sub-stages can move in long strokes in the X direction, which is the scan direction. Fine movements of the main stage (40) with respect to the sub-stages (50, 70) in the Y direction, which is the cross-scan direction, are made using a voice coil motor that comprises: a Y movable element (44) that includes a magnet unit provided on the main stage (40); and a Y stationary element (88) that includes a coil unit provided on a sub-stage (50). Also, lock apparatuses (100a-100d) are used to connect the main stage (40) to the sub-stages (50, 70), in contact (or not in contact) with each. The main stage (40) is moved in the X direction by just driving the sub-stages (50, 70). |
