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发明名称
PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH03238800(A)
申请公布日期
1991.10.24
申请号
JP19890323941
申请日期
1989.12.15
申请人
CANON INC
发明人
SUZUKI NOBUMASA
分类号
H05H1/46;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H05H1/00
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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