| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device, and a device and a method for identifying a charged particle beam irradiation position, each enabling the irradiation position to be accurately measured and the measured data to be recorded.SOLUTION: When an irradiated body 212 is irradiated with charged particle beam, the acoustic signal (elastic wave) generated from the irradiation position is detected with a sensor 242. Furthermore, an analytic model with characteristics of the irradiated body 212 taken into consideration, for analyzing elastic wave signal in detail using the information of the irradiated body 212 is made, a numerical analysis is performed on the detected elastic wave based on the analytic model, so that the generation position of the elastic wave is obtained to obtain the actual irradiation position.SELECTED DRAWING: Figure 8 |
