HOLDING JIG AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a holding jig that can maintain high-polishing rate even when polishing a hard-to-work material and hardly causes a polishing flaw in an obtained polishing object, and to provide a method for manufacturing the same.SOLUTION: The holding jig 100 includes: a holding part 111 for holding an object to be polished; and a frame part 112 for surrounding the object to be polished W held by the holding part. The holding part and the frame part comprise continuously integrated seamless elastic resin foam 110, and the holding part has a compressive deformation rate of 3.0 μm to 15 μm.SELECTED DRAWING: Figure 1