发明名称 |
IN-CLEAN ROOM GLOVE EXCHANGE METHOD, CLEAN ROOM GLOVE EXCHANGE BOX, AND MANUFACTURING METHOD FOR OPTICAL FILM OR SEMICONDUCTOR RELATED MEMBER |
摘要 |
PROBLEM TO BE SOLVED: To provide a glove exchange method, clean room glove exchange box, and manufacturing method for an optical film or semiconductor related member, for preventing a foreign material generated in a glove being exchanged in a clean room from contaminating the inside of the clean room.SOLUTION: An in-clean room glove exchange method prevents a foreign material from leaking to the outside of a clean room glove exchange box by: exchanging gloves by using the clean room glove exchange box 1 comprising a box main body that is installed in a clean room and has an insertion port through which a worker can insert his/her hands and a purifier 4 for purifying air in the box main body to discharge the purified air to the outside of the box; and purifying, by using the purifier, air including the foreign material generated in the clean room glove exchange box to discharge the purified air.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016103548(A) |
申请公布日期 |
2016.06.02 |
申请号 |
JP20140240642 |
申请日期 |
2014.11.27 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
TAKAHASHI SHU;OZAWA KAZUYUKI;MATSUSHITA YUDAI;NAKAJIMA MASATAKA;NIIMI TAKAHIRO;WATANABE TAKUHIKO;MORI KAZUYA;MAEDA HIROYUKI |
分类号 |
H01L21/02;A41D13/00;A41D19/015 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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