发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having good heat dissipation properties, and a method of manufacturing the semiconductor device.SOLUTION: A semiconductor device 1 includes a metal layer 3 provided on a support substrate 2, a semiconductor laminate 4 provided on the metal layer 3, and an electrode 5 provided on the semiconductor laminate 4. The metal layer 3 is in contact with the support substrate 2 and the semiconductor laminate 4 and contains at least one of tungsten, molybdenum, and tantalum. The thickness of the metal layer 3 is 10-60 nm.SELECTED DRAWING: Figure 2
申请公布号 JP2016103635(A) 申请公布日期 2016.06.02
申请号 JP20150222943 申请日期 2015.11.13
申请人 SUMITOMO ELECTRIC IND LTD 发明人 WATANABE SHIYOUSUU
分类号 H01L21/331;H01L21/02;H01L29/737 主分类号 H01L21/331
代理机构 代理人
主权项
地址