VERTICAL CAVITY SURFACE EMITTING LASER ARRAY AND METHOD FOR MANUFACTURING THE SAME

摘要

A VCSEL array includes a base substrate, a plurality of VCSEL devices and an inter-device line. Each of the plurality of VCSEL devices is disposed on a front side of the base substrate. The inter-device line connects two of the plurality of VCSEL devices that are adjacent to each other, the two VCSEL devices being connected in series such that forward directions of the two VCSEL devices are the same. An insulating groove that electrically insulates the two VCSEL devices is formed on the base substrate.

主权项

1. A vertical cavity surface emitting laser array comprising:
a semiconductor substrate; a plurality of vertical cavity surface emitting laser devices formed on a front side of the semiconductor substrate; and an inter-device line that connects two of the plurality of vertical cavity surface emitting laser devices that are adjacent to each other, the two vertical cavity surface emitting laser devices being connected in series such that forward directions of the two vertical cavity surface emitting laser devices are the same, wherein an insulating region that electrically insulates the two vertical cavity surface emitting laser devices is formed on the semiconductor substrate.