In general, the present disclosure relates to systems, apparatuses and methods for depositing materials. In particular, the present disclosure relates to a crucible for evaporating a source material. The crucible has a wall with an inner surface surrounding an inner volume for receiving the source material and one or more heat transfer elements arranged within the inner volume of the crucible.
申请公布号
WO2016082874(A1)
申请公布日期
2016.06.02
申请号
WO2014EP75686
申请日期
2014.11.26
申请人
APPLIED MATERIALS, INC.;SCHÜSSLER, UWE;BANGERT, STEFAN;DIEGUEZ-CAMPO, JOSE MANUEL;LOPP, ANDREAS
发明人
SCHÜSSLER, UWE;BANGERT, STEFAN;DIEGUEZ-CAMPO, JOSE MANUEL;LOPP, ANDREAS