发明名称 |
WIRING-BOARD PRODUCTION METHOD, DATA CORRECTION DEVICE, WIRING-PATTERN FORMATION SYSTEM, AND DATA CORRECTION METHOD |
摘要 |
A step (C) for generating, on the basis of the difference between original data and actual pattern data, correction data for the original data or exposure data is provided with: a step (C-1) in which difference data is generated from the difference between the actual pattern data and the original data; a step (C-2) in which a plurality of correction functions defining the relationship between the cause of the difference and the original-data correction amount or the exposure-data correction amount for suppressing the difference are generated from the relationship between the difference data and the cause of the difference; and a step (C-3) in which a correction function obtained by synthesizing the plurality of correction functions is generated. In the step (C-2) in which the plurality of correction functions are generated, the plurality of correction functions are generated for each in-plane area of the actual pattern board. |
申请公布号 |
WO2016084977(A1) |
申请公布日期 |
2016.06.02 |
申请号 |
WO2015JP83604 |
申请日期 |
2015.11.30 |
申请人 |
HITACHI CHEMICAL COMPANY, LTD. |
发明人 |
YAMAMOTO TEPPEI;NAKAYAMA HAJIME;OGINO HARUO;ISODA SATOSHI |
分类号 |
G03F7/20;H05K3/00;H05K3/06 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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