| 发明名称 |
CASE ISOLATED OIL FILLED MEMS PRESSURE SENSOR |
| 摘要 |
An oil filled pressure sensor is provided. The sensor includes a drift-stabilized pressure sensing element mounted to and electrically isolated from a header body, the pressure sensing element immersed in an oil filled cavity and temperature stabilized for sensing pressure in the cavity without substantial signal drift. A method of fabrication is provided. |
| 申请公布号 |
US2016153858(A1) |
申请公布日期 |
2016.06.02 |
| 申请号 |
US201414557841 |
申请日期 |
2014.12.02 |
| 申请人 |
Strott Douglas B.;Brodeur Russell P.;Washburn Keith R. |
发明人 |
Strott Douglas B.;Brodeur Russell P.;Washburn Keith R. |
| 分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An oil filled pressure sensor comprising:
a drift-stabilized pressure sensing element mounted to and electrically isolated from a header body, the pressure sensing element immersed in an oil filled cavity and temperature stabilized for sensing pressure in the cavity without substantial signal drift. |
| 地址 |
Andover MA US |
