发明名称 |
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE INCLUDING THE SAME |
摘要 |
To provide a semiconductor device including a transistor which includes an oxide semiconductor film and has excellent electrical characteristics. A semiconductor device includes a transistor including a first electrode, a first insulating film over the first electrode, an oxide semiconductor film over the first insulating film, a second insulating film over the oxide semiconductor film, and a second electrode over the second insulating film. The oxide semiconductor film includes a first oxide semiconductor film and a second oxide semiconductor film. The difference between energy at a conduction band minimum of the first oxide semiconductor film and energy at a conduction band minimum of the second oxide semiconductor film is greater than or equal to 0.2 eV. A rate of change in drain current per unit channel width relative to a drain voltage of 1 V can be less than or equal to 2%. |
申请公布号 |
US2016155759(A1) |
申请公布日期 |
2016.06.02 |
申请号 |
US201514946985 |
申请日期 |
2015.11.20 |
申请人 |
Semiconductor Energy Laboratory Co., Ltd. |
发明人 |
YAMAZAKI Shunpei;OKAZAKI Kenichi;KANEMURA Hiroshi;KUROSAKI Daisuke;SHIMA Yukinori;KOEZUKA Junichi;MIYAKE Hiroyuki |
分类号 |
H01L27/12;H01L29/417;H01L29/786 |
主分类号 |
H01L27/12 |
代理机构 |
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代理人 |
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主权项 |
1. A semiconductor device comprising:
a transistor, wherein the transistor includes a first electrode, a first insulating film over the first electrode, an oxide semiconductor film over the first insulating film, a second insulating film over the oxide semiconductor film, and a second electrode over the second insulating film, wherein the oxide semiconductor film includes a first oxide semiconductor film and a second oxide semiconductor film, wherein a difference between energy at a conduction band minimum of the first oxide semiconductor film and energy at a conduction band minimum of the second oxide semiconductor film is greater than or equal to 0.2 eV, and wherein, for the transistor, in a given range of drain voltage, a rate of change in drain current per unit channel width relative to a drain voltage of 1 V is less than or equal to 2%. |
地址 |
Atsugi-shi JP |