| 主权项 |
1. A MEMS sensor for measuring acceleration, said MEMS sensor comprising:
a substrate; an element frame; a spring anchor; a proof-mass; and a flexural spring, wherein the element frame and the spring anchor are rigidly fixed to the substrate, and one end of the spring is connected to the proof-mass and an opposite end of the spring is connected to the spring anchor, wherein in a non-flexed state of the spring, a spring axis extends between the opposite ends of the spring, wherein the proof-mass and the spring extend along a common plane, whereby the spring suspends the proof-mass to a rotary mode of motion in the common plane, wherein the element frame comprises a rectangular form such that in the common plane, an outer surface of the element frame has four sides, of which two longitudinal sides run in parallel in a longitudinal direction, and two transversal sides run in parallel in a transversal direction, when the transversal direction is perpendicular to the longitudinal direction, wherein the rectangular form of the element frame includes a first longitudinal side, and a first transversal side, connected by a first vertex that is closest to the spring anchor, and wherein the spring axis forms an acute angle with the first longitudinal side and with the first transversal side, thereby causing an inherent sensitivity for measuring accelerations in a range covering accelerations in the longitudinal direction and in the transversal direction. |
