| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device and a physical quantity sensor having excellent reliability, and to provide a pressure sensor, a vibrator, an altimeter, an electronic apparatus and a mobile body including the electronic device.SOLUTION: A physical quantity sensor 1 of the present invention includes a substrate 2, a piezoresistive element 5 disposed on one surface side of the substrate 2, a wall disposed on the one surface side of the substrate 2 and enclosing the piezoresistive element 5 in a plan view of the substrate 2, a ceiling disposed on an opposite side of the wall to the substrate 2 and constituting a cavity S together with the wall, and an inner beam 644 disposed on a substrate 2 side of the ceiling and comprising a material having a coefficient of thermal expansion smaller than that of the ceiling.SELECTED DRAWING: Figure 1 |
