发明名称 VIBRATOR UNIT, TARGET SUPPLY DEVICE AND EXTREME UV LIGHT GENERATION SYSTEM
摘要 The vibrator unit according to an embodiment of the present invention is a vibrator unit (310, 320, 330) for applying vibration onto a target material (271) that is supplied inside a target flow path (FL), and equipped with a vibrating element (314) vibrating in response to an electric signal of a predetermined frequency which is input from the exterior. The resonance frequency of the vibrating element may be a frequency that is different from the predetermined frequency of the electric signal. In addition, the vibrator unit according to another embodiment of the present invention is equipped with a vibration transmission member (311, 331) in contact with a first member (265, 260) containing therein the target flow path, and the vibrating element (314) in contact with the vibration transmission member. The specific frequency in the first order mode of the vibration transmission member may be a frequency that is different from the resonance frequency of the vibrating element.
申请公布号 WO2016084167(A1) 申请公布日期 2016.06.02
申请号 WO2014JP81259 申请日期 2014.11.26
申请人 GIGAPHOTON INC. 发明人 HIRASHITA, TOSHIYUKI
分类号 H05G2/00;H01L21/027 主分类号 H05G2/00
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