STATIC ELECTRICITY DISTRIBUTION MEASURING APPARATUS AND STATIC ELECTRICITY DISTRIBUTION MEASURING METHOD

摘要

A static electricity distribution measuring apparatus (1) according to the present disclosure measures the static electricity distribution on a measurement surface of a measurement target (200), and is provided with: an array antenna (2) that receives electric fields generated from each of a plurality of areas (211) on the measurement surface through vibration; a vibrator (3) that vibrates the measurement target (200) or the array antenna (2); a measurer (4) that measures at least one from among intensity, frequency and phase of the electric fields in each of the plurality of areas (211) received by the array antenna (2); a calculator (5) that calculates an amount of static electricity for each of the plurality of areas (211) based on measurement results by the measurer (4); and a drawer (6) that draws the static electricity distribution on the measurement surface based on the amount of static electricity in each of the plurality of areas (211). The array antenna (2) has a plurality of antenna elements (21) respectively corresponding to the plurality of areas (211).

主权项

1. A static electricity distribution measuring apparatus for measuring a static electricity distribution on a measurement surface of a measurement target, the static electricity distribution measuring apparatus comprising:
an array antenna that receives an electric field generated in each of a plurality of areas of the measurement surface through vibration; a vibrator that causes the measurement target or the array antenna to vibrate; a measurer that measures at least one from among intensity, frequency and phase of the electric field in each of the plurality of areas received by the array antenna; a calculator that calculates an amount of static electricity for each of the plurality of areas, based on measurement results by the measurer; and a drawer that draws the static electricity distribution on the measurement surface, based on the amount of static electricity in each of the plurality of areas; wherein the array antenna comprises a plurality of antenna elements respectively corresponding to the plurality of areas.