ELECTROCHEMICAL SENSORS AND PACKAGING AND RELATED METHODS

摘要

Some embodiments include a method. The method can include: providing an integrated lid substrate, the integrated lid substrate having an integrated lid substrate first surface; providing an integrated base substrate, the integrated base substrate having an integrated base substrate first surface; providing a first sensor cavity in the integrated base substrate at the integrated base substrate first surface, the first sensor cavity being configured to receive a first electrolyte element; providing a second sensor cavity in the integrated base substrate at the integrated base substrate first surface, the second sensor cavity being configured to receive a second electrolyte element; providing multiple first electrodes over the integrated lid substrate first surface and/or the integrated base substrate first surface; and providing multiple second electrodes over the integrated lid substrate first surface and/or the integrated base substrate first surface. Other embodiments of related systems and methods are also disclosed.