| 摘要 |
A tri-axial micro-electro-mechanical gyroscope comprises: an annular detection capacitor located at a central position of a substrate (1), the annular detection capacitor comprising four lower plates and an annular upper plate (8), where a first group of lower plates (6a) fits the annular upper plate (8) of a corresponding part of the first group of lower plates (6a) to form a group of first detection capacitors, a second group of lower plates (6b) fits the annular upper plate (8) of a corresponding part of the second group of lower plates (6b) to form another group of first detection capacitors, the annular upper plate (8) is fixed on the substrate (1) at an original point by using a first anchor (5a), two groups of driving capacitors are located at an outer side of the annular detection capacitor and comprise a movable driving electrode (16) and a fixed driving electrode (4), and the two groups of second detection capacitors are located at the outer side of the annular detection capacitor and comprise a movable detection electrode (17) and a fixed detection electrode (3); and a linkage portion, respectively connected to outer edges of the movable driving electrode (16), the movable detection electrode (17), and the annular upper plate (8). The tri-axial micro-electro-mechanical gyroscope has a simple driving manner, a compact structure, and can implement desirable measurement precision and sensitivity. |
