| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature detection device which can detect a temperature in a hot environment with greater accuracy and with suppressed degradation, to reduce manufacturing costs, and which can be manufactured more easily, and a heat treatment device equipped with the temperature detection device.SOLUTION: A temperature detection device 13 of a heat treatment device 1 has a temperature sensor 31 and a protective tube 32 for accommodating and protecting the temperature sensor 31. The protective tube 32 has a first protective part 41, a second protective part 42, and a pressurized gas acceptance part 48. The first protective part 41 forms one end of the protective tube 32. The second protective part 42 forms the other end of the protective tube 32, has a higher heatproof temperature than the heatproof temperature of the first protective part 41, and is connected to the first protective part 41. The pressurized gas acceptance part 48 is provided in the first protective part 41 in order to accept a pressurized purge gas into the inside of the protective tube 32.SELECTED DRAWING: Figure 2 |
