| 主权项 |
1. A MEMS gyroscope, comprising:
a first substrate, comprising:
a movable portion that is capable of moving in response to an angular velocity;a driving mechanism associated with said movable portion for moving the movable portion along a driving direction in a driving mode;a conducting wire of a magnetic source on the movable portion for generating magnetic field; and a second substrate, comprising:
a magnetic sensor that is a spintronic device for measuring the magnetic field from the conducting wire,wherein the magnetic sensor has an easy axis and hard axis;wherein the hard axis is substantially parallel to a sensing direction of a sensing mode of the movable portion; andwherein the conducting wire is disposed such that the current it carries is substantially perpendicular to the sensing direction of the sensing mode of the proof-mass. |
