Semiconductor Device, Module, and Electronic Device

摘要

Provided is an element with stable electrical characteristics or a device including plural kinds of elements with stable electrical characteristics. The semiconductor device includes a first insulator, a transistor over the first insulator, a second insulator over the transistor, and a third insulator over the second insulator. The second insulator includes an opening reaching the first insulator. The opening is filled with a fourth insulator. The first insulator, the third insulator, and the fourth insulator each have a lower hydrogen-transmitting property than the second insulator.

主权项

1. A semiconductor device comprising:
a first insulator; a transistor over the first insulator; a second insulator over the transistor; and a third insulator over the second insulator, wherein the second insulator comprises an opening reaching the first insulator, wherein the opening is filled with a fourth insulator, and wherein the first insulator, the third insulator, and the fourth insulator each have a lower hydrogen-transmitting property than the second insulator.