| 摘要 |
A narrow-spectrum laser device, which may be provided with: a laser resonator including an optical element for narrowing a spectrum width; a pair of discharge electrodes arranged so as to sandwich the light path of pulse laser light in the laser resonator; a power source for applying pulsed voltage to the pair of discharge electrodes; a first wavelength measurement device for measuring the wavelength of the pulse laser light outputted from the laser resonator, and outputting a first measurement result; a second wavelength measurement device for measuring the wavelength of the pulse laser light outputted from the laser resonator, and outputting a second measurement result; and a control unit for calibrating the first measurement result on the basis of the second measurement result. The control unit may calibrate the first measurement result on the basis of the difference between the second measurement result obtained when the power source was controlled such that the power source applied pulsed voltage to the pair of discharge electrodes at a first repeating frequency, and the second measurement result obtained when the power source was controlled such that the power source applied pulsed voltage to the pair of discharge electrodes at a second repeating frequency that is higher than the first repeating frequency. |
