| 摘要 |
PROBLEM TO BE SOLVED: To provide a light deflector with which it is possible to suppress a fluctuation in the oscillation speed of a mirror structure around one axis.SOLUTION: A light deflector 100 comprises a mirror structure having a reflection surface and a support structure for supporting the mirror structure so as to be able to oscillate around a second axis (one axis). The support structure is arranged so as to sandwich the mirror structure in the direction of the second axis, and includes first and second zigzag parts 210a, 210b in which there are a plurality of contiguous meandering beams, a first connection part 111 for connecting one end of the mirror structure and one end of the first zigzag part 210a, a second connection part 112 for connecting the other end of the mirror structure and one end of the second zigzag part 210b, and a plurality of piezoelectric members provided separately in the plurality of beams of the first and second zigzag parts 210a, 210b, the first and second connection parts being provided so as to extend the mirror structure in the direction of a first axis orthogonal to the second axis.SELECTED DRAWING: Figure 2 |
