| 摘要 |
PROBLEM TO BE SOLVED: To measure the displacement of the surface of a measurement object with high accuracy irrespective of the direction of a streak shape when there are minute streak shapes on the surface of the measurement object.SOLUTION: A displacement sensor according to the present invention comprises a light-projection optical system for radiating a plurality of condensed irradiation light including a first irradiation light and a second irradiation light radiated onto the top surface of a workpiece 6 from mutually different directions, and a light-receiving optical system for condensing the reflected light of the plurality of irradiation light that are reflected at irradiated surfaces onto the light receiving surface of a two-dimensional image sensor 8, a first plane formed by the optical axis of the first irradiation light and the optical axis of the light-receiving optical system and a second plane formed by the optical axis of the second irradiation light and the optical axis of the light-receiving optical system intersecting at right angles, the displacement sensor measuring the displacement of the top surface of the workpiece 6 by measuring the displacement of the position of the condensed light of reflected light on the light receiving surface.SELECTED DRAWING: Figure 1 |
