WIRING-BOARD PRODUCTION METHOD, DATA CORRECTION DEVICE, WIRING-PATTERN FORMATION SYSTEM, AND DATA CORRECTION METHOD

摘要

A step (C) for generating, on the basis of the difference between original data and actual pattern data, correction data for the original data or exposure data is provided with: a step (C-1) in which difference data is generated from the difference between the actual pattern data and the original data; a step (C-2) in which a plurality of correction functions defining the relationship between the cause of the difference and the original-data correction amount or the exposure-data correction amount for suppressing the difference are generated from the relationship between the difference data and the cause of the difference; and a step (C-3) in which a correction function obtained by synthesizing the plurality of correction functions is generated.