| 摘要 |
The present invention relates to a shape measurement apparatus, comprising: a measurement arm part having a stylus to measure a shape by contacting a measurement target, and an arm to support the stylus; a measurement arm support part to support the measurement arm part such that the measurement arm part perform a left and a right straight line motion and an up/down pivot rotation along the shape of the measurement target; a measurement force correction part accommodated in the measurement arm support part, correcting a measurement force of the stylus to apply constant measurement pressure to a surface of the measurement target even though the shape of the measurement target is changed while the stylus is rotated up and down; and a control part which senses shape variation of the measurement target, controlling the measurement force correction part to correct the measurement pressure as much as the shape variation. The measurement arm support part comprises: a support part main body; a driving block to support the measurement arm part in a longitudinal direction of the support part main body to be able to move the measurement arm part in a left and right straight line; and a joint plate which includes one end fixated to the measurement arm part in a vertical direction to the measurement arm part, and is rotatably combined to the driving block in the up/down rotary direction of the arm. The measurement force correction part comprises: a permanent magnet combined to protrude in a fixated length in a direction which the joint block is combined to the driving block; and an electromagnet comprised to surround an outer circumference of the permanent magnet, having one end to rotate the joint plate while being moved back and forth along a longitudinal direction of the permanent magnet by applying a current in one direction by being combined to the joint plate. |
