摘要 |
A method includes the steps of: providing a substrate; providing a tool having, on a replication side, a plurality of replication sections, each replication section defining a surface structure of one of an optical element(s), the tool further including at least one contact spacer portion, the contact spacer portion protruding, on the replication side, further than an outermost feature of the replication sections; aligning the tool with a feature of the substrate and bringing the tool and a first side of the substrate together, with replication material between the tool and the substrate, the contact spacer portion contacting the first side of the substrate, and thereby causing the spacer portion to adhere to the first side of the substrate, thereby producing a substrate-tool-assembly; dislocating the substrate-tool-assembly to a hardening station; causing the replication material to harden at the hardening station; and separating the tool from the substrate with the hardened replication material adhering to the substrate. |
申请人 |
HEPTAGON MICRO OPTICS PTE. LTD. |
发明人 |
RUDMANN, HARTMUT;WESTENHÖFER, SUSANNE;HEIMGARTNER, STEPHAN;MORGAN, DIANE;ROSSI, MARKUS |