| 摘要 |
PROBLEM TO BE SOLVED: To provide a frame body conveying device for a substrate holding frame body 10, which is achieved by considering that the substrate holding frame body can be sucked and conveyed without depending on a conventional method for gripping a hand setting part or an engaging part bulging to right and left of the frame body, and to provide a suction method and a suction releasing method using the frame body conveying device.SOLUTION: A frame body conveying device 50, for vacuum sucking a substrate holding frame body 10 to transfer it in a horizontal planar state, includes at least: a suction pad 66 connected through a ventilation pipe 63; and a cap-shaped diffusion prevention cover 67 opened to the lower surface while covering the entire suction pad 66. The diffusion prevention cover 67 is structured so that it can vertically slide while maintaining an airtight state by using the ventilation pipe 63 as a shaft, and an opening having a filter 69 for releasing pressure air is formed on a side face. |
