发明名称 MASK FOR DEPOSITION, MANUFACTURING METHOD FOR THE MASK FOR DEPOSITION AND MANUFACTURING METHOD FOR A DISPLAY APPARATUS
摘要 According to an embodiment of the present invention, disclosed is a mask for deposition which comprises: a mask main body having a plurality of pattern holes; a plurality of protrusions protruding from the mask main body; and a plurality of grooves dented in the mask main body. A grain size of the mask main body is 10-1000 nm. A difference between the highest height of the protrusions and the deepest depth of the grooves is smaller than or equal to 0.5 μm.
申请公布号 KR20160061879(A) 申请公布日期 2016.06.01
申请号 KR20150155870 申请日期 2015.11.06
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 IM, SUNG SOON;HWANG, KYU H.;KIM, JAE SIK;MOON, MIN HO;MOON, YOUNG MIN;CHANG, SOON CHUL;KANG, TAE WOOK
分类号 H01L51/56;H01L21/033;H01L21/268;H01L21/68;H01L21/683;H01L27/32;H01L51/00 主分类号 H01L51/56
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