検査装置および検査方法,申请号JP20120033781-传众专利搜索

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发明名称	検査装置および検査方法
摘要
申请公布号	JP5929293(B2)	申请公布日期	2016.06.01
申请号	JP20120033781	申请日期	2012.02.20
申请人	株式会社ＳＣＲＥＥＮホールディングス;国立大学法人大阪大学	发明人	中西英俊;斗内政吉
分类号	G01N21/3581;G01N21/88;H01L21/66	主分类号	G01N21/3581
代理机构		代理人
主权项
地址

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