发明名称 ELECTRONIC DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 An electronic device including a transistor and a manufacturing method thereof are provided. According to an embodiment of the present invention, a method for manufacturing a transistor comprises the following steps of: providing a semiconductor substrate in which a gate is formed; forming a partially amorphized junction region in the semiconductor substrate on one side of the gate; forming a metal film on the junction region; and completely crystallizing the junction region while performing a heat treatment process to deform the metal film into a metal-semiconductor compound film.
申请公布号 KR20160061738(A) 申请公布日期 2016.06.01
申请号 KR20140164511 申请日期 2014.11.24
申请人 SK HYNIX INC. 发明人 OH, JAE GEUN;RYU, CHOON KUN;LEE, HYUNG SUK
分类号 H01L27/115 主分类号 H01L27/115
代理机构 代理人
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