发明名称 Method for forming pattern, structural body, method for producing comb-shaped electrode, and secondary cell
摘要 Provided are a method for forming a pattern where a plurality of patterns of identical or different pattern materials can be formed on a support in a short time, a structural body, a method for producing a comb-shaped electrode, and a secondary cell. The pattern forming method according to the present invention, where n patterns (n‰¥2) are formed on a support, includes forming a first resist layer on the support surface; repeating: forming a guide hole through a kth resist layer by exposure and development, filling a kth pattern material into the guide hole by a screen printing process, removing the kth resist layer, and forming a (k+1)th resist layer on the support and all pattern materials, regarding kth (k=1 to n-1) pattern material and resist layer in order of k=1 to n-1; performing guide hole formation and nth pattern material filling similarly, and removing the nth resist layer.
申请公布号 EP2784585(B1) 申请公布日期 2016.06.01
申请号 EP20140162289 申请日期 2014.03.28
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 ASAI, TAKAHIRO;ISHIKAWA, KAORU
分类号 G03F7/023;B05D1/32;G03F7/039;G03F7/20;G03F7/40;H01L21/28;H01L21/288;H01M4/04;H01M4/13;H01M4/139;H01M4/66;H01M6/40;H01M10/0525 主分类号 G03F7/023
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