发明名称 |
Method for forming pattern, structural body, method for producing comb-shaped electrode, and secondary cell |
摘要 |
Provided are a method for forming a pattern where a plurality of patterns of identical or different pattern materials can be formed on a support in a short time, a structural body, a method for producing a comb-shaped electrode, and a secondary cell. The pattern forming method according to the present invention, where n patterns (n‰¥2) are formed on a support, includes forming a first resist layer on the support surface; repeating: forming a guide hole through a kth resist layer by exposure and development, filling a kth pattern material into the guide hole by a screen printing process, removing the kth resist layer, and forming a (k+1)th resist layer on the support and all pattern materials, regarding kth (k=1 to n-1) pattern material and resist layer in order of k=1 to n-1; performing guide hole formation and nth pattern material filling similarly, and removing the nth resist layer. |
申请公布号 |
EP2784585(B1) |
申请公布日期 |
2016.06.01 |
申请号 |
EP20140162289 |
申请日期 |
2014.03.28 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
ASAI, TAKAHIRO;ISHIKAWA, KAORU |
分类号 |
G03F7/023;B05D1/32;G03F7/039;G03F7/20;G03F7/40;H01L21/28;H01L21/288;H01M4/04;H01M4/13;H01M4/139;H01M4/66;H01M6/40;H01M10/0525 |
主分类号 |
G03F7/023 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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