| 摘要 |
The invention relates to a vertical probe card (1) provided with a housing (8) which has a pressure chamber (11) made of a portion (10) of the housing (8) that is in the shape of a cylinder jacket. Outside the pressure chamber (11) an axially mobile sealing ring (6, 7) is provided. The Bernoulli effect, which is produced by compressed gas flowing from the pressure chamber (11) or from ducts (16) provided in the sealing ring (6) into the gap (13) between the sealing ring (6, 7) and a semiconductor element (5), causes the sealing ring (6, 7) to be held at a defined distance from the semiconductor element (5). |
