Elongated capacitively coupled plasma source for high temperature low pressure environments

摘要

A modular plasma source assembly for use with a processing chamber is described. The assembly includes an RF hot electrode with an end dielectric and a sliding ground connection positioned adjacent the sides of the electrode. A seal foil connects the sliding ground connection to the housing to provide a grounded sliding ground connection separated from the hot electrode by the end dielectric. A coaxial feed line passes through a conduit into the RF hot electrode isolated from the processing environment so that the coaxial RF feed line is at atmospheric pressure while the plasma processing region is at reduced pressure.

主权项

1. A modular plasma source assembly comprising:
an elongate housing having a side wall, an electrically grounded front face and a gas volume; an elongate RF hot electrode within the housing, the elongate RF hot electrode having a front face, a back face, elongate sides and a first end and a second end defining an elongate axis, the elongate RF hot electrode spaced from the front face to form a gap between the front face of the RF hot electrode and the front face of the elongate housing; an end dielectric in contact with each of the first end and the second end of the RF hot electrode and between the RF hot electrode and the side wall; a sliding ground connection positioned at one or more of the first end and the second end of the RF hot electrode opposite the end dielectric, the sliding ground connection isolated from direct contact with the RF hot electrode by the end dielectric; a seal foil positioned at each sliding ground connection opposite the end dielectric, the seal foil forming an electrical connection between the front face of the elongate housing and the sliding ground connection; and a coaxial RF feed line passing through the elongate housing, the coaxial RF feed line including an outer conductor and an inner conductor separated by an insulator, the outer conductor in communication with electrical ground and the inner conductor in electrical communication with the elongate RF hot electrode.