Method for fabricating optical semiconductor tubes and devices thereof

摘要

Semiconductor micro- and nanotubes allow the incorporation of ordered structures such as quantum wells and quantum dots into them providing the potential for ultralow threshold micro- and nanoscale lasers for use in applications such as future ultrahigh-speed photonic systems as well as quantum information processing. According to the invention a means of manufacturing these with high reproducibility, low processing complexity, and at high densities is provided. Also provided is a means of releasing these micro- and nanotubes with low stress and a method of “pick-and-place” allowing micro- and nanotubes to be exploited in devices integrated on substrates that are either incompatible with the manufacturing technique or where the area of substrate required to manufacture them is detrimental to the cost or performance of the circuit.

主权项

1. A device comprising:
a substrate; and a semiconductor nanotube comprising at least:
a first predetermined portion formed from a first predetermined number of revolutions of a semiconductor film within a spiral comprising a plurality of semiconductor layers, wherein the plurality of semiconductor layers have a first predetermined profile of at least one of stress and strain from a first surface of the semiconductor film to a second opposite surface of the semiconductor film; andsecond and third predetermined portions at each end of the first predetermined portion, the second and third predetermined portions formed from a second predetermined number of revolutions of the semiconductor film within the spiral comprising the plurality of semiconductor layers such that the first predetermined portion of the semiconductor nanotube has a smaller diameter than the second predetermined portion.