发明名称 Stress compensation patterning
摘要 An apparatus includes a device that includes at least one layer. The at least one layer includes an inter-device stress compensation pattern configured to reduce an amount of inter-device warpage prior to the device being detached from another device.
申请公布号 US9355967(B2) 申请公布日期 2016.05.31
申请号 US201313946135 申请日期 2013.07.19
申请人 QUALCOMM Incorporated 发明人 Kim Daeik D.;Lan Je-Hsiung;Velez Mario Francisco;Zuo Chengjie;Kim Jonghae;Yun Changhan
分类号 H01L23/48;H01L23/52;H01L29/40;H01L23/00;H01L21/02;G06F17/50 主分类号 H01L23/48
代理机构 Toler Law Group 代理人 Toler Law Group
主权项 1. An apparatus comprising: a device comprising a first layer located at a first side of a substrate and a second layer located at a second side of the substrate, wherein the first layer includes an inter-device stress compensation pattern configured to reduce an amount of device warpage prior to the device being detached from another device, and wherein the second layer includes a second stress compensation pattern that is different than the inter-device stress compensation pattern.
地址 San Diego CA US