发明名称 |
Stress compensation patterning |
摘要 |
An apparatus includes a device that includes at least one layer. The at least one layer includes an inter-device stress compensation pattern configured to reduce an amount of inter-device warpage prior to the device being detached from another device. |
申请公布号 |
US9355967(B2) |
申请公布日期 |
2016.05.31 |
申请号 |
US201313946135 |
申请日期 |
2013.07.19 |
申请人 |
QUALCOMM Incorporated |
发明人 |
Kim Daeik D.;Lan Je-Hsiung;Velez Mario Francisco;Zuo Chengjie;Kim Jonghae;Yun Changhan |
分类号 |
H01L23/48;H01L23/52;H01L29/40;H01L23/00;H01L21/02;G06F17/50 |
主分类号 |
H01L23/48 |
代理机构 |
Toler Law Group |
代理人 |
Toler Law Group |
主权项 |
1. An apparatus comprising:
a device comprising a first layer located at a first side of a substrate and a second layer located at a second side of the substrate, wherein the first layer includes an inter-device stress compensation pattern configured to reduce an amount of device warpage prior to the device being detached from another device, and wherein the second layer includes a second stress compensation pattern that is different than the inter-device stress compensation pattern. |
地址 |
San Diego CA US |