Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations

摘要

A process load lock apparatus is disclosed. The process load lock apparatus includes a load lock chamber adapted to couple between a mainframe section and a factory interface, the load lock chamber including an entry and an exit each having a slit valve, and a load lock process chamber located at a different level than the load lock chamber at the load lock location wherein the load lock process chamber is adapted to carry out a process on a substrate, such as oxide removal or other processes. Systems including the process load lock apparatus and methods of operating the process load lock apparatus are provided. A lift assembly including a containment ring is also disclosed, as are numerous other aspects.

主权项

1. An electronic device processing system, comprising:
a mainframe section including a robot configured to move substrates; a factory interface having one or more load ports adapted to receive substrate carriers thereat; and a process load lock apparatus received between the mainframe section and the factory interface, the process load lock apparatus including
a load lock chamber located between and coupled to the mainframe section and the factory interface, the load lock chamber including an entrance accessible from the factory interface and an exit accessible from the mainframe section, anda load lock process chamber adapted to carry out a process on a substrate, the load lock process chamber coupled to the mainframe section and located at a different level than the load lock chamber
the load lock process chamber further includes a lift assembly including a containment ring, and horizontally extending fingers configured to support a substrate underneath the containment ring,wherein the containment ring and the horizontally extending fingers are configured to move as a unit upon actuation by a lift actuator.